Effects of Furnace and Inlet Gas Mixture Temperature on Growing Carbon Nanotube in a CVD Reactor

Document Type: Research Paper

Abstract

Carbon nanotubes (CNTs), nowadays, are one of the important nanomaterials that can be produce with different methods such as chemical vapor deposition (CVD). Growing of CNTs via CVD method can be influenced by several operating parameters that can affect their quality and quantity. In this article, the effects of inlet gas mixture temperature on CNT’s local growth rate, total production, and length uniformity are numerically studied in two distinct growth regimes, mass transfer controlled regime and surface reaction controlled regime, separately. Also, the effects of the interaction of inlet gas mixture temperature with furnace temperature on CNT growth are investigated.

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